描述
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Su Mingli | +86 18059281367 | sales5@xrjdcs.com
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Xiamen XingRuiJia is a supplier of
LAM 810-102361-222 segment submodule
and will be your good helper. Please feel free to inquire for more details.
Features:
LAM 810-102361-222 segment submodule
summary
LAM 810-102361-222 is a segment submodule produced by LAM Research for use in etching machines. It has the following characteristics:
High precision: etching accuracy can reach ± 0.1 μ M
High repeatability: Etching repeatability can reach up to 3 σ
High efficiency: etching rate can reach 10 μ M/min
High reliability: adopting industrial grade design, with an MTBF of up to 500000 hours
Easy to use: supports autofocus and calibration